Hard mask development taps use of nanocrystals

  
MANHASSET, NY -- Pixelligent, a provider of nanocrystaladditives, and Brewer Science are using their nanocrystal and microelectroniccoating technologies to create a next-generation spin-on hard mask forsemiconductor lithography processes.  

Pixelligent Technologies collaborated with Brewer Sciencewith support from National Science and Technology Institute (NIST) providing an$8 million Technology Innovation Program award.      

"We have worked very closely with Pixelligent over the pasttwo years and have been impressed by their unique capability for producing 2-5-nmdiameter, high-purity metal oxide nanocrystals that are stably dispersed inorganic media," said Tony Flaim, CTO of Brewer Science, in a statement.   

When commercialized, the new hard mask will be available inBrewer Science's OptiStack system of lithography solutions.

Pixelligent's zirconia and hafnia nanocrystals are used tomagnify the optical, electronic, thermal, and mechanical properties of numerouspolymer systems. Brewer Science is a process integration house.

Pixelligent will demonstrate results at the June NanotechConference & Expo 2012.

This story was originally posted by EETimes.
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